Chamber Sensitive constant temperature and humidity for high-precision tester for semiconductor, DISPLAY
. Improved reliability by compromised with simple system
. Adaptive design for each tester
| ITEM |
Specification |
Remark |
| Range |
Temperature |
21 ~ 25℃ |
OA àTemperature · Humidity are left to right |
| Humidity |
40~ 50% |
| Control Range |
Temp : ±0.1℃
Humidity: ±1 % |
- |
| Clean Room |
CLASS 1 |
- |
| Air volume |
90CMM @ 500Pa |
- |
| Material |
SPCC+ Main body Coating |
- |
반도체, DISPLAY 용 고정밀 검사기기를 위한 정밀 항온.항습 Chamber
. 간략한 시스템 구성을 통한 신뢰성 향상.
. 각종 검사기기에 맞는 맞춤 설계.
